New concept of high-k integration in MOSFET’s by a deposition through contact holes

✍ Scribed by S Harrison; P Coronel; F Wacquant; C Regnier; F Leverd; A Beverina; J Bustos; B Tavel; T Skotnicki

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 414 KB
• Volume: 72
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.01.030