A new reactive sputtering technique for
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Wakeham, Steve ;Thwaites, Mike ;Tsakonas, Costas ;Cranton, Wayne ;Ranson, Robert
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Article
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2010
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John Wiley and Sons
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English
⚖ 288 KB
## Abstract The temperature sensitive nature of the substrates used in the flexible displays market necessitates a low temperature deposition technique for processing them. ZnS:Mn exhibiting high intensity photoluminescence (PL) and good crystallinity has been deposited onto Si wafers, glass micros