✦ LIBER ✦
New Approach to the ALD of Bismuth Silicates; Bi(CH2SiMe3)3 Acting as a Precursor for both Bismuth and Silicon
✍ Scribed by J. Harjuoja; T. Hatanpää; M. Vehkamäki; S. Väyrynen; M. Putkonen; L. Niinistö; M. Ritala; M. Leskelä; E. Rauhala
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 316 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0948-1907
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