✦ LIBER ✦
New approach to remove crystal originated pits in Czochralski-grown silicon: combination of germanium ion implantation with solid-phase epitaxy
✍ Scribed by Qinghua Xiao; Hailing Tu
- Book ID
- 108165911
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 363 KB
- Volume
- 271
- Category
- Article
- ISSN
- 0022-0248
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