✦ LIBER ✦
New applications of focused ion beam technique to failure analysis and process monitoring of VLSI : K. Nikawa, K. Nasu, M. Murase, T. Kaito, T. Adachi and S. Inoue. 27th a. Proc. IEEE/IRPS Int. Reliab. Phys. Symp., 43 (1989)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 104 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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