In this study, lithium thio-germanate thin-film electrolytes for lithium rechargeable batteries have been successfully prepared by radiofrequency (RF) magnetron sputtering deposition in Ar gas atmospheres. The targets for RF sputtering were prepared by melting, milling and pressing the appropriate a
New amorphous thin films of lithium ion conductive solid electrolyte
β Scribed by Katsuki Miyauchi; Kazunobu Matsumoto; Keiichi Kanehori; Tetsuichi Kudo
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 286 KB
- Volume
- 9-10
- Category
- Article
- ISSN
- 0167-2738
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Amorphous oxide and oxynitride lithium electrolyte thin films were synthesized by r.f. magnetron sputtering of lithium silicates and lithium phosphates in Ar, Ar+O x, Ar+N" or N 2 . The composition, structure, and electrical properties of the films were characterized using ion and electron beam, X-r
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