New algorithm of white-light phase shifting interferometry pursing higher repeatability by using numerical phase error correction schemes of pre-processor, main processor, and post-processor

✍ Scribed by Jung-Hwan Kim; Sung-Won Yoon; Jeong-Ho Lee; Woo-Jung Ahn; Heui-Jae Pahk

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 302 KB
• Volume: 46
• Category: Article
• ISSN: 0143-8166
• DOI: 10.1016/j.optlaseng.2007.08.008