New AIM listing for IQE

• Book ID: 104366286
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 325 KB
• Volume: 16
• Category: Article
• ISSN: 0961-1290
• DOI: 10.1016/s0961-1290(03)00979-7

✦ Synopsis

Matheson Tri-Gas Inc's Electronics Group (MTEG) has launched ULTIMA-Sorb, a new and improved solution for hydride abatement.

Developed in alliance with ATMI Inc, the ULTIMA-Sorb employs the newest dry abatement technology to abate MOCVD process gases, especially arsine and phosphine.