✦ LIBER ✦
Neutralization of Acceptors and Formation of Agglomerates in Silicon Wafers Due to Intrinsic Point Defects Created by Chemomechanical Polishing and by Quenching
✍ Scribed by Reichel, J. ;Sevcik, S.
- Book ID
- 105380142
- Publisher
- John Wiley and Sons
- Year
- 1987
- Tongue
- English
- Weight
- 573 KB
- Volume
- 103
- Category
- Article
- ISSN
- 0031-8965
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