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Neutral copper cluster sputtering yields: Ne+ Ar+ and Xe+ bombardment

✍ Scribed by S.R. Coon; W.F. Calaway; M.J. Pellin


Book ID
113285640
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
546 KB
Volume
90
Category
Article
ISSN
0168-583X

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## Abstract Layer‐type van der Waals semiconductor WS~2βˆ’__x__~ films were grown by radio frequency reactive magnetron sputtering from a metallic tungsten target onto oxidized silicon substrates. The sputtering atmosphere consisted of 75% hydrogen sulfide and 25% neon, argon or xenon. The substrate