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Neue Entwicklungen beim Hohlkatoden-Gasflusssputtern. New Developments in Hollow Cathode Gas Flow Sputtering

✍ Scribed by Kai Ortner; Mario Birkholz; Thomas Jung


Book ID
111701910
Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
145 KB
Volume
15
Category
Article
ISSN
0947-076X

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