Net Shape Reaction Bonded Ceramic Micro Parts by Mechanical Microstructuring

✍ Scribed by H.-J. Ritzhaupt-Kleissl; J. R. Binder; T. Gietzelt; J. Kotschenreuther

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 448 KB
• Volume: 8
• Category: Article
• ISSN: 1438-1656
• DOI: 10.1002/adem.200600052

✦ Synopsis

Net shape ceramic micro components can be realized by mechanical microstructuring green blanks consisting of precursor materials followed by reaction bonding. The precursor material is composed of mainly zirconium silicide as reactive precursor material, organosilicon polymer (PMSS) as low loss binder and zirconium oxide as an inert phase. Shaping in the green state can easily be performed by micro milling, even if different cutting strategies are applied. Subsequently the components are thermally processed for ceramization and for sintering them to full density. Dependent on the material composition and on the green density the dimensions of the sintered components are retained unchanged compared to the dimensions of the green parts.