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Negative-ion implantation technique

✍ Scribed by Junzo Ishikawa; Hiroshi Tsuji; Yoshitaka Toyota; Yasuhito Gotoh; Koji Matsuda; Masayasu Tanjyo; Shigeki Sakai

Book ID: 113284879
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 728 KB
Volume: 96
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)00444-7

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