✦ LIBER ✦
Nearly damage - free dry etching of AlGaInP/GaInP by electron cyclotron resonance technique
✍ Scribed by J. Hommel; F. Schneider; M. Moser; C. Geng; F. Scholz; H. Schweizer
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 307 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.