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Near surface modification of α-Al2O3 by ion implantation followed by thermal annealing

✍ Scribed by H. Naramoto; C.J. McHargue; C.W. White; J.M. Williams; O.W. Holland; M.M. Abraham; B.R. Appleton


Publisher
Elsevier Science
Year
1983
Weight
778 KB
Volume
209-210
Category
Article
ISSN
0167-5087

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