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Narrow resonance profiling study of the oxidation of reactively sputtered Ti1−xAlxN thin films

✍ Scribed by M.C Hugon; J.M Desvignes; B Agius; I.C Vickridge; D.J Kim; A.I Kingon

Book ID: 114171976
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 153 KB
Volume: 161-163
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(99)00953-2

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