Template-Directed Liquid ALD Growth of T
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Thelese R. B. Foong; Yaodong Shen; Xiao Hu; Alan Sellinger
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Article
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2010
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John Wiley and Sons
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English
⚖ 874 KB
## Abstract Dense and well‐aligned arrays of TiO~2~ nanotubes extending from various substrates are successfully fabricated via a new liquid‐phase atomic layer deposition (LALD) in nanoporous anodic alumina (AAO) templates followed by alumina dissolution. The facile and versatile process circumvent