Nanostructuring of the submonolayer carbon coatings deposited onto the surface of silicon single crystals in a low-pressure microwave discharge plasma

✍ Scribed by V. Ya. Shanygin, R. K. Yafarov

• Book ID: 120810045
• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 677 KB
• Volume: 57
• Category: Article
• ISSN: 1063-7842
• DOI: 10.1134/S1063784212080233