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Nanostructured oxides on porous silicon microhotplates for NH3 sensing

✍ Scribed by R. Triantafyllopoulou; X. Illa; O. Casals; S. Chatzandroulis; C. Tsamis; A. Romano-Rodriguez; J.R. Morante

Book ID: 104051864
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 319 KB
Volume: 85
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.12.038

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## Abstract Nanostructured p‐type and n‐type porous silicon samples were prepared for (100) and (111) orientations and a systematic study is carried out on the effects of orientations, dopant type (boron and phosphorous), current density (20 and 30mA/cm^2^) and etching time on the formation, optica