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Nanostructured material based on Tin and Titanium Oxides: A potentiodynamic study

✍ Scribed by T. L. Kulova; Yu. E. Roginskaya; A. M. Skundin

Book ID
106522283
Publisher
SP MAIK Nauka/Interperiodica
Year
2005
Tongue
English
Weight
112 KB
Volume
41
Category
Article
ISSN
1023-1935

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layer (Brewer Science XHRIC-16) was spun on the sample at 4000 rpm for 30 s and oven prebaked at 175 C for 3 min. Photoresist (PR; Shipley 510A) was spun on the ARC at 4000 rpm and oven prebaked for 3 min at 95 C. IL with 355 nm third-harmonic YAG laser beam was used to produce periodic nanopatterns