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Nanostructured Columnar Tin Oxide Thin Film Electrode for Lithium Ion Batteries

โœ Scribed by Zhang, Yuelan; Liu, Ying; Liu, Meilin


Book ID
121858197
Publisher
American Chemical Society
Year
2006
Tongue
English
Weight
153 KB
Volume
18
Category
Article
ISSN
0897-4756

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layer (Brewer Science XHRIC-16) was spun on the sample at 4000 rpm for 30 s and oven prebaked at 175 C for 3 min. Photoresist (PR; Shipley 510A) was spun on the ARC at 4000 rpm and oven prebaked for 3 min at 95 C. IL with 355 nm third-harmonic YAG laser beam was used to produce periodic nanopatterns