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Nanostructured black silicon and the optical reflectance of graded-density surfaces

✍ Scribed by Branz, Howard M.; Yost, Vernon E.; Ward, Scott; Jones, Kim M.; To, Bobby; Stradins, Paul


Book ID
120388965
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
595 KB
Volume
94
Category
Article
ISSN
0003-6951

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## Abstract Si nanostructures are prepared by thermal annealing of silicon rich oxide (SRO) which is deposited using low pressure (LP) CVD. X‐ray diffraction (XRD), Raman spectroscopy, infrared (IR) spectroscopy, and transmission electron microscopy (TEM) are used to characterize the structure of t