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Nanostructure and adhesion of electroless-plated Cu film on the self-catalyzed Cu using metal-plasma ion implanter

✍ Scribed by Uei-Shin Chen; Wei-Jen Hsieh; Han C. Shih; Yee-Shyi Chang; Ko-Wei Weng; Da-Yung Wang


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
486 KB
Volume
237
Category
Article
ISSN
0168-583X

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