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Nanostructural and optical features of amorphous AlxSi0.45−xO0.55 (0 ⩽ x ⩽ 0.05) thin films prepared by RF-magnetron sputter techniques

✍ Scribed by J.-H. Shim; N.-H. Cho; E.H. Lee


Book ID
116670591
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
691 KB
Volume
353
Category
Article
ISSN
0022-3093

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