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[NanoScience and Technology] Nanoparticles from the Gasphase Volume 653 || Synthesis and Film Formation of Monodisperse Nanoparticles and Nanoparticle Pairs

โœ Scribed by Lorke, Axel; Winterer, Markus; Schmechel, Roland; Schulz, Christof


Book ID
115506885
Publisher
Springer Berlin Heidelberg
Year
2012
Weight
992 KB
Category
Article
ISBN
3642285465

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## Abstract A study of the synthesis of carbon nanoparticles embedded in carbon thin films deposited by radiofrequency (RF) (13.56โ€‰MHz) Ar/H~2~ (4โ€‰%)/C~2~H~2~ plasmas is presented. The carbon nanospheres exhibit an amorphous structure that is clearly observed at 300โ€‰W, under 0.1โ€‰Torr, and grows in