Nanoscaled Semiconductor-On-Insulator Structures and Devices

✍ Scribed by Lysenko V.S., Nazarov A.N., Hall S.

Year: 2007
Tongue: English
Leaves: 380
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

The book details many of the key issues associated with the scaling to nano-dimensions of silicon-on-insulator structures. Some papers offer new insight particularly at the device/circuit interface as appropriate for SOI which is fast becoming a mainstream technology. One of the key issues concerns mobility degradation in SOI films less than about 5nm. The advantages of combining scaled SOI devices with high permittivity (k) dielectric indicates that potential solutions are indeed available down to the 22nm node even with 5nm SOI films.

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