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Nanoscale patterning using photo-assisted polymer transfer lithography

✍ Scribed by In-Sung Park; Moonik Jang; Jinho Ahn

Book ID: 108207753
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 418 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.01.208

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