✦ LIBER ✦
Nanoscale p-MOS Thin-Film Transistor With TiN Gate Electrode Fabricated by Low-Temperature Microwave Dopant Activation
✍ Scribed by Yu-lun Lu; Fu-kuo Hsueh; Kuo-ching Huang; Tz-yen Cheng; J. M. Kowalski; J. E. Kowalski; Yao-jen Lee; Tien-sheng Chao; Ching-yi Wu
- Book ID
- 126600622
- Publisher
- IEEE
- Year
- 2010
- Tongue
- English
- Weight
- 308 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0741-3106
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