Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

✍ Scribed by Xiaohong Jiang; Guoyun Wu; Jingfang Zhou; Shujie Wang; Ampere A Tseng; Zuliang Du

• Book ID: 115021204
• Publisher: Springer-Verlag
• Year: 2011
• Tongue: English
• Weight: 610 KB
• Volume: 6
• Category: Article
• ISSN: 1931-7573
• DOI: 10.1186/1556-276x-6-518