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Nanopatterning mask fabrication by femtosecond laser irradiation

✍ Scribed by Y. Zhou; M.H. Hong; J.Y.H. Fuh; L. Lu; B.S. Luk’yanchuk; C.S. Lim; Z.B. Wang

Book ID: 104023675
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 961 KB
Volume: 192-193
Category: Article
ISSN: 0924-0136
DOI: 10.1016/j.jmatprotec.2007.04.058

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