Nanoparticles and plasmon resonance based probe for failure analysis of ULSI microchips and electrical characterizations of metallic interconnects

✍ Scribed by Shahmoon, Asaf; Meiri, Amihai; Livshits, Pavel; Zalevsky, Zeev

• Book ID: 118747226
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 664 KB
• Volume: 104
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2012.11.017