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Nanoparticle scanning and detection on flat and structured surfaces using fluorescence microscopy

✍ Scribed by Rasim Guldiken; Prashanth Makaram; Kaveh Bakhtari; Jingoo Park; Ahmed A. Busnaina

Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
262 KB
Volume
70
Category
Article
ISSN
1059-910X

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✦ Synopsis

Abstract

A new technique is proposed for the scanning and detection of nanoparticles on flat substrates and three‐dimensional structures using fluorescence microscopy. This technique is utilized for particle removal measurements especially in semiconductor and hard disk manufacturing. This fluorescent particle scanning technique enables nanoscale particle detection. The technique shows that single particles down to 63 nm could be detected and counted. The technique is also capable of detecting particles in trenches that are as deep as 500 ΞΌm. Microsc. Res. Tech., 2007. Β© 2007 Wiley‐Liss, Inc.

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