Nanomorphological characteristics of the single-crystal Si(100) surface subjected to microwave plasma processing at weak adsorption

✍ Scribed by V. Ya. Shanygin, R. K. Yafarov

• Book ID: 120810213
• Publisher: Springer
• Year: 2013
• Tongue: English
• Weight: 318 KB
• Volume: 58
• Category: Article
• ISSN: 1063-7842
• DOI: 10.1134/S1063784213040221