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Nanometrology as a key part of the infrastructure of nanotechnology

✍ Scribed by Gavrilenko, V. P.; Todua, P. A.

Book ID: 120594369
Publisher: SP MAIK Nauka/Interperiodica
Year: 2013
Tongue: English
Weight: 843 KB
Volume: 8
Category: Article
ISSN: 1995-0780
DOI: 10.1134/S1995078013030087

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