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Nanometric cutting of single crystal silicon surfaces modified by ion implantation

✍ Scribed by F.Z. Fang; Y.H. Chen; X.D. Zhang; X.T. Hu; G.X. Zhang

Publisher
International Academy for Production Engineering
Year
2011
Tongue
English
Weight
388 KB
Volume
60
Category
Article
ISSN
0007-8506

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