Nanometer resolusion three-dimensional microprobe RBS analyses by using a 200 kV focused ion beam system

✍ Scribed by Ryo Mimura; Hirosuke Takayama; Mikio Takai

• Book ID: 114167357
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 280 KB
• Volume: 210
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)01044-9