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Nanometer positioning of a linear motion stage under static loads

✍ Scribed by Awaddy, B.A.; Wu-Chu Shih; Auslander, D.M.

Book ID: 117875789
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 154 KB
Volume: 3
Category: Article
ISSN: 1083-4435
DOI: 10.1109/3516.686679

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