✦ LIBER ✦
Nanometer pattern fabrication using superficial image emphasis lithography (SIEL)
✍ Scribed by T. Ishii; S. Moriya; K. Harada
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 230 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0167-9317
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