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Nanolithography with metastable helium atoms in a high-power standing-wave light field

✍ Scribed by S.J.H. Petra; L. Feenstra; W. Hogervorst; W. Vassen


Book ID
106026390
Publisher
Springer
Year
2004
Tongue
English
Weight
259 KB
Volume
78
Category
Article
ISSN
0721-7269

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