✦ LIBER ✦
Nanolithography with a high-resolution STEM : C. P. Umbach, A. N. Broers, R. H. Koch, C. G. Willson and R. B. Laibowitz. IBM J. Res. Devl. 32, 454 (1988)
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 241 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0026-2714
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