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Nanolithography method by using localized surface plasmon mask generated with polydimethylsiloxane soft mold on thin metal film

✍ Scribed by Zhang, Yukun; Dong, Xiaochun; Du, Jinglei; Wei, Xingzhan; Shi, Lifang; Deng, Qiling; Du, Chunlei


Book ID
115433390
Publisher
Optical Society of America
Year
2010
Tongue
English
Weight
517 KB
Volume
35
Category
Article
ISSN
0146-9592

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