Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provide
Nanolithography and Patterning Techniques in Microelectronics (Woodhead Publishing in Materials)
โ Scribed by David G. Bucknall
- Year
- 2005
- Tongue
- English
- Leaves
- 424
- Category
- Library
No coin nor oath required. For personal study only.
โฆ Synopsis
Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications. A number of chapters look at ways of forming and modifying surfaces for patterning. These are complemented by chapters on particular patterning techniques such as soft lithography, ion beam patterning, the use of nanostencils, photolithography and inkjet printing. The book also discusses prototyping and the manufacture of particular devices. With its distinguished international team of contributors, Non-conventional lithography and patterning will be a standard reference for both those researching and using advanced polymers in such areas as microelectronics and biomedical devices.
โฆ Table of Contents
Nanolithography and patterning techniques in microelectronics......Page 2
Contents......Page 6
Contributor contact details......Page 10
Preface......Page 14
Block copolymer nanolithography......Page 16
Surface-induced structure formation of polymer blends......Page 54
Rapid prototyping of functional microfabricated devices by soft lithography......Page 91
Chemomechanical surface modification of materials for patterning......Page 135
Patterning of polymer thin films......Page 170
Ion beam patterning......Page 199
Nanofabrication by shadow deposition through nanostencils......Page 233
Photolithography beyond the diffraction limit......Page 253
Ink-jet printing as a tool in manufacturing and instrumentation......Page 282
Actuators and patterns for microfluidic control......Page 314
Manipulation of biomolecules and reactions......Page 335
Nonlithographic patterning: application of inkjet printing in organic-based devices......Page 364
High-resolution, printing techniques for plastic electronics......Page 388
Index......Page 414
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