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Nanolithographic templates from diblock copolymer thin films

✍ Scribed by Mansky, P.; Harrison, C. K.; Chaikin, P. M.; Register, R. A.; Yao, N.

Book ID: 120347880
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 822 KB
Volume: 68
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.116192

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