Nanoindentation investigation of the Youngâs modulus of porous silicon
✍ Scribed by Bellet, D.; LamagneÌre, P.; Vincent, A.; BreÌchet, Y.
- Book ID
- 120197799
- Publisher
- American Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 338 KB
- Volume
- 80
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.363305
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📜 SIMILAR VOLUMES
Nanoindentation techniques were used to measure Young's modulus for nanocrystalline Fe samples produced by inert-gas condensation and warm consolidation. The samples had grain sizes of 4-20 nm and residual porosity of 2-30% calculated relative to conventional Fe. Values of Young's modulus for the na
## Abstract With the number of MEMS based applications utilizing porous silicon increasing, it has become more important to know the mechanical properties of the material. Using nanoindentation, the Young's modulus of various n‐type and p‐type mesoporous silicon samples has been measured. The porou