Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP

✍ Scribed by I. Maximov; P. Carlberg; I. Shorubalko; D. Wallin; E-L. Sarwe; M. Beck; M. Graczyk; W. Seifert; H.Q. Xu; L. Montelius; L. Samuelson

• Book ID: 114155514
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 411 KB
• Volume: 67-68
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(03)00071-6