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Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands

✍ Scribed by Yuan-Ming Chang; Sheng-Rui Jian; Jenh-Yih Juang


Book ID
107470782
Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
839 KB
Volume
5
Category
Article
ISSN
1931-7573

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