Nanofabrication of superconducting MgB2 neutron detector

✍ Scribed by Shigehito Miki; Ken’ichi Takahashi; Daisuke Fujiwara; Hisashi Shimakage; Zhen Wang; Kazuo Satoh; Tsutomu Yotsuya; Kousuke Moriwaki; Hiroki Fukuda; Satoru Okayasu; Masaki Katagiri; Yukio Morii; Kiichi Hojou; Nobuo Niimura; Takekazu Ishida

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 291 KB
• Volume: 529
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2004.05.021

✦ Synopsis

We report on the fabrication of MgB 2 neutron detector based on 10 B enriched superconducting MgB 2 thin films. The MgB 2 thin films were prepared by a multiple targets sputtering system. To increase the nuclear reactions of MgB 2 with neutrons, we used a 10 B-enriched target (97.0%). The MgB 2 meander lines with SiO protect layer and Al electrodes were fabricated by e-beam lithography, conventional etching and deposition techniques. The meander line width was 1.0 mm and the total length reached 47.3 cm. The DC characteristics measurements showed that the superconducting DC characteristics of fabricated MgB 2 meander lines were almost the same with the unprocessed film.