Intended To Update Scientists And Engineers On The Current State Of The Art In A Variety Of Key Techniques Used Extensively In The Fabrication Of Structures At The Nanoscale. The Present Work Covers The Essential Technologies For Creating Sub 25 Nm Features Lithographically, Depositing Layers With N
โฆ LIBER โฆ
Nanofabrication
โ Scribed by C.D.W. Wilkinson
- Book ID
- 103597924
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 291 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
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