✦ LIBER ✦
Nanocrystalline silicon deposition at high rate and low temperature from pure silane in a modified ICP-CVD system
✍ Scribed by Tian, Lin; Fathi, Ehsanollah; Tarighat, Roohollah S; Sivoththaman, Siva
- Book ID
- 121437743
- Publisher
- Institute of Physics
- Year
- 2013
- Tongue
- English
- Weight
- 717 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0268-1242
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