✦ LIBER ✦
Nanocrystalline Si : H thin films grown at room temperature with plasma-enhanced chemical vapour deposition at a very high pressure
✍ Scribed by Gao, L; Lu, N P; Liao, L G; Ji, A L; Cao, Z X
- Book ID
- 121363293
- Publisher
- Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 760 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0022-3727
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